Autors: Todorov, G. D., Todorov, T. S., Valtchev S., Ivan E I., Klaassens B.
Title: Tuning techniques for kinetic MEMS energy harvesters
Keywords: kinetic energy harvester; electrostatic stiffness; frequency tuninig; resonance

Abstract: The paper presents piezoelectric vibrating micro electromechanical system (MEMS) harvesters with variable effective spring stiffness. The structure of the harvesters consists of proof mass suspended by an elastic beam. A viscous damper represents the energy dissipation of the system. Piezoelectric layers, disposed on the maximum stress zone of the beam surface, are used as generators of electric energy. The stiffness of the beam is varied by capacitors, which are positioned at the maximum deflection zone of the beam. Different types of feedback circuits are considered in order to investigate.

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