|Autors: Yordanka Vucheva., Georgi Kolev., Mariya Aleksandrova., Denishev, K. H.|
Title: Investigation of MEMS piezoelectric transformer with PVDF thin layer
Keywords: PVDF, MEMS, piezoelectric thin layer, piezoelectric transformer
Abstract: Abstract. This paper presents the results of experimental work on the thin piezoelectric polyvinylidene fluoride (PVDF) film, which is used as piezoelectric transformer. The piezoelectric PVDF film was deposited by spray deposition technique on flexible polyethylene terephthalate (PET) substrate and its thickness was measured to be 2 µm. For electrodes is deposited aluminum (Al) by thermal evaporation in vacuum. The voltage gain characteristics were measured at different frequencies. It was observed that at input frequency 1 MHz, the voltage gain characteristic started to decrease.
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