Autors: Minkov, D. A., Angelov, G. V., Nestorov R N.
Title: Perfecting the dispersion model free characterization of a thin film on a substrate specimen from its normal incidence interference transmittance spectrum
Keywords: perfecting the characterization

Abstract: An algorithm is proposed for perfecting the envelope method (EM) for characterization of a thin film on a substrate specimen from its normal incidence interference transmittance spectrum T(λ). It takes into account the partial coherence of light propagating through the film, due to light scattering mainly associated with roughness of the surface film/air, in the computations of both the smoothed transmittance spectrum Tsm(λ) and the extinction coefficient k(λ) of the film. The algorithm includes enhanced computation of the envelopes T+(λ) and T- (λ) of Tsm(λ), and adjustment of points T+(λt) and T-(λt) in spectral regions of substrate non-transparency as λt are the wavelengths of the tangency points between Tsm(λ) and its envelopes. The average thicknessd¯ and the non-uniformity Δd of the film are computed by EM based optimization procedure, followed by obtaining the refractive index n(λ) of the film by optimized curve fitting over approximated values n0(λt) of n(λt) without employing

References

    Issue

    Thin Solid Films, vol. 706, pp. 137984:1-11, 2020, Netherlands, Elsevier, ISSN 0040-6090

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