Е-Публикации
Технически университет - София

Abstract: Micro-optical lenses are critical components in modern optoelectronics, medical devices, and imaging systems. However, finishing processes such as polishing, grinding, and laser ablation often introduce surface and subsurface defects, degrading optical performance. This paper investigates common defects (e.g., scratches, pits, waviness, and residual stresses), their root causes, and advanced characterization techniques (AFM, white-light interferometry, SEM). Furthermore, we discuss mitigation strategies, including process optimization and alternative finishing methods (ion-beam polishing, plasma etching). The study aims to provide a framework for improving manufacturing precision and optical quality in micro-lens.

References

1. ISO 10110-7: 2017, Optics and photonics-Preparation of drawings for optical elements and systems-Part 7: Surface imperfection tolerances.
2. W. C. Sweatt, D. D. Gill, D. P. Adams, M. J. Vasile and A. A. Claudet, "Diamond milling of micro-optics, " in IEEE Aerospace and Electronic Systems Magazine, vol. 23, no. 1, pp. 13-17, Jan. 2008, doi: 10. 1109/AES-M. 2008. 4444483.
3. C. Liberale et al., "Micro-Optics Fabrication on Top of Optical Fibers Using Two-Photon Lithography, " in IEEE Photonics Technology Letters, vol. 22, no. 7, pp. 474-476, April1, 2010, doi: 10. 1109/LPT. 2010. 2040986.
4. C. Koos et al., "Efficient Coupling Interfaces in Photonic Systems Enabled by Printed Freeform Micro-Optics, " 2018 20th International Conference on Transparent Optical Networks (ICTON), Bucharest, Romania, 2018, pp. 1-2, doi: 10. 1109/ICTON. 2018. 8473851.
5. H. P. Herzig, "Integration of micro-optics and micromechanics, " 2003 Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003) (IEEE Cat. No. 03TH8666), Munich, Germany, 2003, pp. 672
6. N. Quack, G. Huszka, A. Toros, T. Graziosi, M. Kiss and S. Mi, "Micro-Optics in Single Crystal Diamond, " 2021 26th Microoptics Conference (MOC), Hamamatsu, Japan, 2021, pp. 1-2, doi: 10. 23919/MOC52031. 2021. 9598028.
7. D. M. Kane, R. J. Chater and D. S. McPhail, "Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging, " 2011 International Quantum Electronics Conference (IQEC) and Conference on Lasers and Electro-Optics (CLEO) Pacific Rim incorporating the Australasian Conference on Optics, Lasers and Spectroscopy and the Australian Conference on Optical Fibre Technology, Sydney, NSW, Australia, 2011, pp. 2105-2107, doi: 10. 1109/IQEC-CLEO. 2011. 6194151.
8. P. Obreja, D. Cristea, A. Dinescu and E. Manea, "Replication Techniques for Micro-Optics, " 2007 International Semiconductor Conference, Sinaia, Romania, 2007, pp. 187-190,.
9. A. Michael, S. H. Chen and C. Y. Kwok, "Design, fabrication and testing of piezo-electric driving mechanism for micro-optics, " 2015 Transducers-2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Anchorage, AK, USA, 2015, pp. 2101-2104
10. Y. H. Lo, A. T. T. D. Tran, Z. H. Zhu and G. L. Christenson, "Integrated micro-optical interferometer arrays, " Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing, Keystone, CO, USA, 1996, pp. 25-26, doi: 10. 1109/LEOSST. 1996. 540779.
11. Y. Aoki, T. Kato, J. R. Mizuno and K. Iga, "A micro optical bench for alignment-free optical coupling, " 1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No. 98TH8369), Monterey, CA, USA, 1998, pp. II/57-II/58
12. D. Pepedzhiev and V. Hristov, "Software for image analysis and inspection of optical lens, " 2023 27th International Conference on Information Technology (IT), Zabljak, Montenegro, 2023, pp. 1-5, doi: 10. 1109/IT57431. 2023. 10078533.
13. P. Zhang et al., "High-resolution optical inspection of curved surfaces, " IEEE Trans. Instrum. Meas., vol. 71, pp. 1-10, 2022, Art no. 9000410, doi: 10. 1109/TIM. 2021. 3128812.

Issue