Autors: Bratovanov, N. G.
Title: CAD-Based Wafer Scanning Simulations Applicable to the Field of Semiconductor Device Manufacturing
Keywords: Substrate-handling robots; semiconductor device manufacturing, robot simulation; wafer mapping; wafer scanning; SolidWorks API

Abstract: This paper contributes to the development of wafer scanning simulation algorithms, which have been successfully integrated into an existing substrate handling robot simulator based on computer-aided design (CAD) software. The scanning process, which is extremely important to the field of semiconductor device manufacturing and cleanroom robotics has to be described, analyzed, mathematically modelled and later implemented into the source code of the mentioned simulator, which has been written in Visual Basic .NET programming language. As a result, the end-used is allowed to efficiently perform wafer scanning simulations in a virtual environment, without depending on the physical equipment, and be able to retrieve precise information related to the particular automated system. The proposed approach is verified and evaluated with the help of an experimental wafer scanning simulation scenario, based on SolidWorks and its application-programming interface (API).


  1. W. Den, S. Hu, C. Garza and O. Zargar, 2020, Review-Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing, ECS Journal of Solid State Science and Technology, Volume 9(6), pp. -
  2. A. Bhvanagarwala, S. Borkar, T. Sakurai and S. Narendra, 2010, EP2: The semiconductor industry in 2025, 2010 IEEE International Solid-State Circuits Conference, Volume -, pp. 534–535
  3. I. Kao and C. Chung C, 2021, Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers, -, Volume -, pp. -
  4. M. Cong and D. Cui, 2009, Wafer-Handling Robots and Applications, Recent Patents on Engineering, Volume 3(3), pp. 170–177
  5. H. Cheng, H. Chen and B. Mooring, 2014, Accuracy Analysis of Dynamic-Wafer-Handling Robotic System in Semiconductor Manufacturing, IEEE Transactions on Industrial Electronics, Volume 61(3), pp. 1402–1410
  6. “Introduction to the wafer scanning process,” Gencobot GPR Series Reference Manual, p. 117 (2002)
  7. N. Bratovanov, “Robot Modeling, Motion Simulation and Off-line Programming Based on SolidWorks API,” in Third IEEE International Conference on Robotic Computing (IRC), pp. 574–579 (2019)
  8. N. Bratovanov, “SolidWorks Add-In for Motion Simulation, Layout Analysis and Collision Detection of Substrate Handling Robots,” Proceedings of Technical University of Sofia, ISSN 1311-0829 70(1), pp. 29–39 (2020)
  9. L. Malpass, SolidWorks API Series 1: Programming & Automation, Second edition, p. 16 (2011)


International Conference on Engineering, Technologies and Systems - TECHSYS 2021, TU – Sofia, Plovdiv Branch, 2021, Bulgaria, ISBN pending publication

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