Autors: Aleksandrova, M. P., I. Cholakova., G. Bodurov., G. Kolev., Dobrikov, G. H.
Title: Influence of UV Treatment on the Electro-optical Properties of Indium Tin Oxide Films Used in Flexible Displays
Keywords: flexible displays, indium tin oxide, RF sputtering, UV treatment.

Abstract: Indium-tin oxide films are deposited by low plasma temperature RF sputtering on highly flexible modification of glycol polyethyleneterephtalate substrates. The produced layers are characterized with transparency over 82 % and sheet resistance of 86.9 Ω/square. The film’s conductivity was further improved by additional UV illumination from light source (365 nm), having power of 250 W. The influence of the UV exposure dose on the structural and electro-optical properties of ITO was investigated. It was established that the optimum time of illumination is 10 minutes and further UV treatment leads to polymer substrates degradation. Structural and bonds type analysis show that at longer treatment carbon atoms release and diffuse into ITO films, which worsen their electrical behavior. For the optimum UV dose the minimum sheet resistance was measured to be 19.2 Ω/square, and the maximum transparency remained almost unchanged – above 82 %.

References

    Issue

    ICMON 2012: XXXIII International Conference on Microelectronics, Optoelectronics, and Nanoelectronics, Paris, France, November 28-29, 2012, Journal of World Academy of Science, Engineering and Technology, issue 71, pp. 1337 – 1340, 2012, France,

    Цитирания (Citation/s):
    1. Shadi A. Alnaanah, Aymen H. Qatamin, Melanie K. Dieterlen, and Sergio B. Mendes, Effects of UV treatment on the properties of ultra-thin indium tin oxide films during growth and after deposition by cavity ring-down spectroscopy, Optics Continuum Vol. 1, Issue 12, pp. 2503-2512 (2022). - 2022 - от чужди автори в чужди издания, неиндексирани в Scopus или Web of Science

    Вид: пленарен доклад в международен форум, публикация в реферирано издание