Autors: G. Kolev., Aleksandrova, M. P., Videkov, V. H., Denishev, K. H., P. Truhchev.
Title: Piezoelectric MEMS Stress Sensor with Thin Lead Zirconate Titanate (PZT) Layer
Keywords: MEMS, sensors, piezoelectric, PZT

Abstract: In this study results from fabrication and testing of MEMS stress sensor with piezoelectric sensitive layer of lead zirconate titanate (PZT) are presented. PZT layers are deposited by RF-sputtering in vacuum. The dependence of the voltage, generated by the structure, on the applied stress is investigated for two different electrode configurations – sandwich type and lateral type, with aluminum electrodes. The obtained results show high piezoelectric coefficient of 186 pC for thickness of PZT-layer of 180 nm. The maximal generated voltage is 35 mV for lateral structure in the stress range of 0-300 mgr. The sandwich structure is sensitive above 1,1 gr and the maximal voltage is 200 mV.



    IEEE Conference - 20th Telecommunications Forum TELFOR 2012, 20-22 November 2012, pp. 991-993, 2012, Serbia,

    Цитирания (Citation/s):
    1. Alanazi, N., Almutairi, M., Muthuramamoorthy, M., & Alodhayb, A. (2022). Review - measurements of ionizing radiations using micromechanical sensors. ECS Journal of Solid State Science and Technology, 11(5) doi:10.1149/2162-8777/ac6f20 - 2022 - в издания, индексирани в Scopus или Web of Science

    Вид: пленарен доклад в международен форум, публикация в реферирано издание