|Autors: Aleksandrova, M. P., A. Ozturk.|
Title: Capacitive MEMS Compression Sensor for Touchscreen Display Applications
Keywords: MEMS, Capacitive Pressure Sensor, Displays, Touchscreen.
Abstract: MEMS compression sensor based on capacitive principle of operation was produced for touchscreen system for display applications. The sensitivity and precision of the sensor were increased by deposition of thin sputtered film from titanium dioxide, having high relative permittivity of 86. The flexible silicon membrane was additionally treated with supersonic wave for increase the cavity size formed under the etched silicon. The sensitivity after this treatment was increased from 2.2 to 2.45 pF/gr.mm-2, because the membrane area’s was enlarged from 1.2 to 1.4 mm2 without to decrease the overall membrane thickness (100 μm). The maximal allowable compression that the treated sensor can stand is 22 gr/mm2, which is even higher than the normal finger touch. The sensor is characterized with relatively high linearity (only 1.8% deviation).
Вид: постер/презентация в международен форум