Autors: Videkov, V. H., Tzaneva, B. R.
Title: Topological structure of thick anodic aluminum oxide
Keywords: anodic aluminum oxide; hole patterns photoresist; pillar pat

Abstract: The paper examines the possibility of obtaining topological structures from thick anodic alumina using a dry photoresist mask. A hypothesis for the oxide distribution under the photoresist is proposed and the model is compared to the experimental results using pillar and hole patterning. It is shown that the shape of the pattern curvature on growing anodic oxide has a significant effect on the stability of the photoresist.



    2021 XXX International Scientific Conference Electronics (ET), 2021, Bulgaria, IEEE, DOI 10.1109/ET52713.2021.9579697

    Copyright IEEE

    Вид: постер/презентация в международен форум, публикация в реферирано издание, индексирана в Scopus