Autors: Cholakova, I. N. Title: Different Technological Methods for Offset Compensation in Si Hall Effect Sensors Keywords: Magnetic sensors, Hall effect sensors, offset compensation, Abstract: This paper presents technological methods for offset compensation of symmetrical Hall sensors. The offset compensation is one of the most important tasks to solve for accurate measurements by such type of magnetic sensors. The presented methods could be a good solution because the main conductive region is deeply "buried" in the epitaxial layer. In this way it will be away from the surface and well isolated from the substrate modulation. References Issue
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