Autors: Ganev, B. T., Nikolov, D. N., Marinov, M. B.
Title: Performance Evaluation of MEMS Pressure Sensors
Keywords: Allan deviation, barometric pressure sensor, MEMS, sensor noise

Abstract: Sensors for atmospheric pressure monitoring are important for many applications. They include indoor positioning, environmental monitoring, and more. This paper presents a study of the main characteristics of micromechanical atmospheric sensors. Four different models of microelectromechanical (MEMS) pressure sensors were studied. Some of the models along with the pressure measure additional parameters such as temperature, relative humidity, and air quality. The research evaluated the accuracy of the sensors, the impact of the change of basic atmospheric parameters on it, and their noise characteristics. The results show that low-budget MEMS pressure sensors offer many advantages for the efficient implementation of different applications. An important prerequisite for this is the use of appropriate algorithms for the fusion of sensor data, which can increase the reliability of their data.



    2020 XI National Conference with International Participation (ELECTRONICA), Sofia, Bulgaria, pp. 1-4, 2020, Bulgaria, DOI 10.1109/ELECTRONICA50406.2020.9305140

    Цитирания (Citation/s):
    1. Xu G, Lin J, Yu R, Zhang Z, Gao M, Ye L. Packaging of a MEMS sensor in an active interventional blood pressure monitoring catheter. In: 2021 22nd International Conference on Electronic Packaging Technology, ICEPT 2021; 2021, DOI: 10.1109/ICEPT52650.2021.9567945 - 2021 - в издания, индексирани в Scopus или Web of Science
    2. Schwenck A, Grözinger T, Günther T, Schumacher A, Schuhmacher D, Werum K, Zimmermann A. Characterization of a pcb based pressure sensor and its joining methods for the metal membrane. Sensors. 2021, DOI 10.3390/s21165557 - 2021 - в издания, индексирани в Scopus или Web of Science

    Вид: пленарен доклад в международен форум, публикация в реферирано издание, индексирана в Scopus