Autors: Nikolov, D. N. Title: A case study of emission microscopy for ESD protection devices Keywords: ESD physical mechanism, photon emission microscopy, root cau Abstract: The paper presents an investigation of a typical ESD protection device with a photon emission microscope. The photon emissions from a normal and failed p-n junction with tunnelling breakdown are compared. The failure is caused by the ESD event. The comparison provides root cause analysis of the ESD failure, recognition of the physical mechanism to enable further analysis of ESD failures in integrated circuits References Issue
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Вид: публикация в международен форум, публикация в реферирано издание, индексирана в Scopus