Autors: Delibozov, N. G.
Title: Overwiew of Advanced MEMS Design Systems
Keywords: Design Kit, Design Suite, MEMS design, VLSI, Xplorer

Abstract: This paper presents state-of-the-art design processes for microelectromechanical systems (MEMS) devices in concurrent collaborative design environment. The design of MEMS integrated system will occur at the system level, driven primarily by the application. Methodologies that ease the integration of the digital domain to the real world using mixed domain technologies are therefore crucial. A hierarchical structured design approach is compatible with standard IC design. It starts with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. This flow is based on a process-independent design representation of commonly used MEMS building blocks, and process-dependent materials properties, design rules, and parasitic parameters.

References

  1. Xuan F. Zha and H. Du, 2003, Manufacturing process and material selection in concurrent collaborative design of MEMS devices,, Journal of Micromechanics and Microengineering, Volume 1, pp. 509-522
  2. Tamal Mukherjee, 2005, CAD for Integrated MEMS Design, Pittsburgh, Carner Mellon University
  3. Sandeep Akkaraju, 2010, N/MEMS Design Methodologies Efficient workflow for robust, firsttimeright design, Woburn, MA, IntelliSense
  4. Agilent Technologies, Inc.,, 2005, Design Kit Development, Santa Clara, CA, Agilent Technologies, Inc.,
  5. SoftMEMS LLC, 2006, Manual, Los Gatos, CA, SoftMEMS LLC

Issue

International Jubilee Congress SCIENCE AND EDUCATION FORTHE FUTURE, pp. 178 - 181, 2012, Bulgaria,

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