Autors: Delibozov, N. G., Radonov, R. I., Hristov, M. H.
Title: Evolution of Integrated MEMS Design Methodology
Keywords: MEMS design methodology, integrated MEMS design, MEMS CAD

Abstract: The long term impact of MEMS technology will be in its ability to integrate novel sensing and actuation functionality on traditional computing and communication devices enabling the ubiquitous digital computer to interact with the world around it. The design and verification of such integrated systems will occur at the system level, driven primarily by the application [1]. Therefore application-driven system level design methodologies are needed to ease the integration of the digital area to the real world using mixed area technologies


  1. T. Mukherjee, 2003, MEMS Design and Verification, Pittsburgh, USA, Carnegie Mellon University
  2. EECatalog, 2012, Sensors and MEMS, <>, Дата на последен преглед (Last accessed on): 04.06.2012


ANNUAL JOURNAL OF ELECTRONICS, vol. 6, issue 2, pp. 63 - 65, 2012, Bulgaria,

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