Autors: Tsanev, T. D., Aleksandrova, M. P., Ivanova, T., Dobrikov, G. H.
Title: Investigation of Lead-free Potassium Niobate Thin Films on Silicon for Piezoelectric Transducers
Keywords: Deposition conditions, Lead-free piezoelectrics, Nano-coatings, Piezoelectric response, Piezoelectric voltage, Radio frequency sputtering, Silicon devices Vacuum sputtering

Abstract: KNbO3 thin films are explored with possible application as piezoelectric transducers. The films are grown by vacuum radiofrequency sputtering and their thickness, uniformity, composition and piezoelectric response are studied as a function of the sputtering voltage, sputtering pressure and plasma power. Single layer sensing structure with aluminum electrodes is fabricated. The relation between the deposition conditions and the structure capacity and piezoelectric voltage is established. The peak value of the generated voltage is 2.89 V and its effective value is ∼483 mV



    10th National Conference with International Participation, 16 May 2019 through 17 May 2019, vol. ELECTRONICA 2019 - Proceedings, issue 10, pp. Article number 8825592, 2019, Bulgaria, Institute of Electrical and Electronics Engineers Inc., DOI 10.1109/ELECTRONICA.2019.8825592

    Copyright IEEE

    Вид: пленарен доклад в международен форум, публикация в реферирано издание, индексирана в Scopus