Autors: Pavlova, R. A., Gilev, B. N., Tarnev, K. C.
Title: Axial Evolution of the Electron Energy Distribution in Capacitive Discharges
Keywords: capacitive discharges, variations of the electron energy distribution function

Abstract: One dimensional particle-in-cell Monte-Carlo (PIC-MC) model of a capacitive discharge is presented in the paper. In contrast to the models and experiments in the literature where usually the distance between the electrodes is few centimeters, in our model the distance is increased to 10 cm. The stress in the study is on the variations of the electron energy distribution function (EEDF) along the discharge axis. It is demonstrated that close to the electrodes the EEDF varies slightly from the Maxwellian one, while in the central part of the discharge the EEDF is bi-Maxwellian or Druyvesteyn-like depending on the gas discharge conditions.

References

    Issue

    44th International Conference on Applications of Mathematics in Engineering and Economics (AMEE’44), vol. Conference Proceedings 2048 (AIP CP 2048), pp. Article number 030007, 2018, Bulgaria, American Institute of Physics Inc., DOI 10.1063/1.5082065

    Copyright American Institute of Physics Inc.

    Цитирания (Citation/s):
    1. Tarnev, K., Pavlova, R. , "Simultaneous existence of stochastic and ohmic heating in capacitive discharges", Journal of Plasma Physics 85(2),905850201 - 2019 - в издания, индексирани в Scopus или Web of Science
    2. Tarnev, K., Pavlova, R. "Small radius capacitive discharges", AIP Conference Proceedings 2048,030008 - 2018 - в издания, индексирани в Scopus или Web of Science

    Вид: пленарен доклад в национален форум с межд. уч., публикация в издание с импакт фактор, публикация в реферирано издание, индексирана в Scopus и Web of Science