Autors: Yordanov, R. S., Boyadjiev, S., Georgieva, V., Vergov, L.
Title: Characterization of thin MoO3 films formed by RF and DC-magnetron reactive sputtering for gas sensor applications
Keywords: Chemical sensors, Cost effectivenessEducation, Gas detectorsMolybdenum oxide, Quartz, Quartz crystal microbalances, Reactive sputtering, Resonators

Abstract: The present work discusses a technology for deposition and characterization of thin molybdenum oxide (MoOx, MoO3) films studied for gas sensor applications. The samples were produced by reactive radio-frequency (RF) and direct current (DC) magnetron sputtering. The composition and microstructure of the films were studied by XPS, XRD and Raman spectroscopy, the morphology, using high resolution SEM. The research was focused on the sensing properties of the sputtered thin MoO3 films. Highly sensitive gas sensors were implemented by depositing films of various thicknesses on quartz resonators. Making use of the quartz crystal microbalance (QCM) method, these sensors were capable of detecting changes in the molecular range. Prototype QCM structures with thin MoO3 films were tested for sensitivity to NH3 and NO2. Even in as-deposited state and without heating the substrates, these films showed good sensitivity. Moreover, no additional thermal treatment is necessary, which makes the product

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    Journal of Physics: Conference Series, vol. 514, issue 1, 2014, United Kingdom, Institute of Physics Publishing, ISBN ISSN: 17426588

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    Вид: статия в списание, публикация в издание с импакт фактор