Autors: Yordanov, R. S., Boyadjiev, S., Georgieva, V.
Title: Characterization of RF and DC magnetron reactive sputtered TiO2 thin films for gas sensors
Keywords: Gas sensor, Quartz crystal microbalance, Reactive sputtering, Thin films

Abstract: This study presents the technology for preparing and characterization of titanium oxide thin films with properties suitable for gas sensors. For preparing the samples the reactive radio frequency (RF) and direct current (DC) magnetron sputtering methods were used. The composition and microstructure of the films were studied by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and Raman spectroscopy, the surface of the films was observed applying high-resolution scanning electron microscopy (SEM). For measuring the thickness and identifying the refractive indices of the films laser ellipsometry was used. The research was focused on the sensing behavior of the sputtered titania thin films applying quartz crystal microbalance (QCM) method, which allows detection of mass changes in the nanogram range. Prototype QCM sensors with TiO2 thin films were made by our team and tested for sensitivity to NH3 and NO2. These films even in as-deposited state and without heating the subst



    Digest Journal of Nanomaterials and Biostructures, vol. 9, issue 2, pp. 467-474, 2014, Romania, National Institute R&D Materials Physics, ISBN ISSN: 18423582

    Цитирания (Citation/s):
    1. Lu, Y.W., Tseng, Y., Lee, J.S., Lee, W.J., Lateral-to-vertical growth transition of TiO2 nanorods grown on FTO-glass substrate by hydrothermal process,Digest Journal of Nanomaterials and Biostructures 11(2), pp. 507-515 - 2016 - в издания, индексирани в Scopus или Web of Science
    2. Vashchilin, V.S., Krivinozhko, E.V., Sabitov, L.S., Trukhanov, S.V., Saipova, L.K.H.-A., Influence of oxygen fraction on the characteristics of titanium oxide coatings obtained by the magnetron method,Journal of Physics: Conference Series 2124(1),012025 - 2021 - в издания, индексирани в Scopus или Web of Science

    Вид: статия в списание, публикация в издание с импакт фактор, индексирана в Scopus и Web of Science