|Autors: Aleksandrova, M. P., Dobrikov, G. H., Cholakova, I. N., G. D. Kolev., G. K. Bodurov.|
Title: TUNING OF THE ELECTRO-OPTICAL AND STRUCTURAL PROPERTIES OF NANO-SIZED FILMS FOR ELECTRODE APPLICATION IN FLEXIBLE DISPLAY
Keywords: nanosized films, flexible displays, vacuum depositon
Abstract: Conductive transparent indium-tin oxide films are deposited by vacuum reactive sputtering on polymer substrate for flexible display applications. The thickness of the produced films is 148 nm. The deposition conditions are modified in comparison with the conventional modes for glass based displays in such way, to prevent the polymer substrate from thermal degradation and mechanical stress. Resistance, transparency in the visible range, surface morphology and chemical composition for the produced layers are investigated. Electro-optical and structural properties are tuned by setting of the argon sputtering gas pressure between 2.10-2 Torr and 3.7.10-2 Torr. The optimum values of the film’s parameters for usage as viewer display electrode in this case are found to be 58.1 Ohm/square and 87.8 % for argon concentration of 2.5.10-2 Torr.
Вид: публикация в национален форум, публикация в реферирано издание