Autors: Todorov, G. D., Dimitrov, L. V., Kamberov, K. H.
Title: MEMS actuator designs characterization based on numerical analysis approach
Keywords: Lorentz Force | Magnetometers | Magnetic Sensors

Abstract: This paper discusses the results of a numerical analysis of the design of a micro-magnetic actuator. An electromagnetic examination of the possible design geometries of a specific MEMS actuator has been made in order to determine its force-displacement behaviour under different applied currents. The main goal of the simulations made is to gather enough information on the design of each component and to evaluate the designed geometry as a whole. Three separate variants for actuator's design are juxtaposed. Acting on the movable stage forces have been determined and a final optimised design variant has been selected.

References

    Issue

    International Conferences on Multi-Material Micro Manufacture, 2009, Germany,

    Цитирания (Citation/s):
    1. Todorov, T., Nikolov, N., Nikolov, R., Sofronov, Y., Kochev, L., Optimization of micro-electro-mechanical piezoelectric energy harvesters with interdigitated electrodes, Journal of the Balkan Tribological Association 25(3), pp. 535-545 - 2019 - в издания, индексирани в Scopus или Web of Science
    2. Kandeva, M., Rozhdestvensky, Y.V., Svoboda, P., Kalitchin, Z., Zadorozhnaya, E., Influence of the size of silicon carbide nanoparticles on the abrasive wear of electroless nickel coatings. Part 1, Journal of Environmental Protection and Ecology 20(4), pp. 1889-1903 - 2019 - в издания, индексирани в Scopus или Web of Science
    3. Malakov, I., Zaharinov, V., Choosing an Optimal Size Range of the Product “Pipe Clamp”, Studies in Fuzziness and Soft Computing 403, pp. 197-213 - 2021 - в издания, индексирани в Scopus или Web of Science

    Вид: публикация в международен форум, публикация в реферирано издание, индексирана в Scopus