|Autors: Hristov, M. H., Takov, T. B., Cholakova, I. N., Denishev, K. H., Grozdanov V. E., Gaydazhiev D. G.|
Title: Design and investigation of a thermal actuator
Keywords: MEMS, Thermal actuator, Surface micromachining, PolyMUMPs
Abstract: Recently, there is tremendous interest in Micro Electro Mechanical Systems (MEMS) technology. MEMS refer to a collection of microsensors and actuators that can sense environment and have the ability to react to changes, with the use of a microcircuit control. Microelectromechanics have accomplished phenomenal growth over the past few years, due to rapid advances in theoretical developments, experimental results and high-performance compute design software. Thermal actuation has been extensively employed in MEMS. It includes a broad spectrum of principles, such as thermal pneumatic, shape memory alloy (SMA) effect, bimetal effect, mechanical thermal expansion, etc. Thermal actuators can generate relatively large force and displacement at low actuating voltage.
Вид: постер/презентация в международен форум, публикация в реферирано издание, индексирана в Google Scholar