|Autors: Delibozov, N. G., Spasova, M. L., Radonov, R. I., Angelov, G. V., Hrisrov, M. H.
Title: Analysis of Electronic Structure of Carbon Nanotubes
Keywords: silicon nanotube, MEMS, Fermi level, Fabrication
Abstract: A class of carbon nanotube composite materials was developed to take advantages of the precise high aspect ratio shape of patterned, vertically-grown nanotube forest. This patterned forest was rendered mechanically robust by chemical vapor infiltration and released by etching an underlying sacrificial layer. Using this technique a diverse variety of functional MEMS devices, including cantilevers, bistable mechanisms, and thermomechanical actuators are fabricated. A wide range of chemical vapor depositable materials could be used as fillers such as silicon and silicon nitride. The carbon nanotube framework technique may enable high aspect ratio MEMS fabrication from a variety of materials with desired properties such as high temperature stability or robustness.
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