|Autors: Bankova A., Videkov, V. H., Tzaneva, B. R., Andreev, S. K.|
Title: Investigation of the mechanical stability of nanostructured anodic aluminum oxid
Keywords: anodic aluminum oxide; anodization; mechanical bending; mechanical properties
Abstract: For instance, in microelectromechanical systems (MEMS), nanostructured freestanding membranes and beams are being used as sensing elements or as actuators for transferring the mechanical deflections to electrical signals. Hence, such a parameter as the mechanical stability of oxide is of prime importance for the manufacture of the above devices. The aim of this work is to present the results from a newly developed experimental setup for mechanical bending of nanostructured free-standing membranes and beams of aluminum oxide. Fabricated specimens considered in the present study have a thickness of 2μm and 4μm, which are prepared using a selective process of etching and anodizing. Repetitive mechanical bending is achieved through a mechanism driven by an electromagnet capable to perform precise displacement. The results obtained can be used in various nanotechnological applications that use anodic aluminium oxide membrane, subjected to repeated loads.
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