|Autors: Bankova A., Videkov, V. H., Tzaneva, B. R., Andreev, S. K.|
Title: Investigation of the mechanical stability of nanostructured anodic aluminum oxid
Keywords: anodic aluminum oxide; anodization; mechanical bending; mechanical properties
Abstract: For instance, in microelectromechanical systems (MEMS), nanostructured freestanding membranes and beams are being used as sensing elements or as actuators for transferring the mechanical deflections to electrical signals. Hence, such a parameter as the mechanical stability of oxide is of prime importance for the manufacture of the above devices. The aim of this work is to present the results from a newly developed experimental setup for mechanical bending of nanostructured free-standing membranes and beams of aluminum oxide. Fabricated specimens considered in the present study have a thickness of 2μm and 4μm, which are prepared using a selective process of etching and anodizing. Repetitive mechanical bending is achieved through a mechanism driven by an electromagnet capable to perform precise displacement. The results obtained can be used in various nanotechnological applications that use anodic aluminium oxide membrane, subjected to repeated loads.
Вид: статия в списание
Въведена от: доц. д-р Боряна Рангелова Цанева