Autors: Stefanov, B. I., Granqvist, C.G., Österlund, L.
Title: Fine control of the amount of preferential <001> orientation in DC magnetron sputtered nanocrystalline TiO2 films
Keywords: Photocatalysis, TiO2, Preferential orientation, Sputtering

Abstract: Different crystal facets of anatase TiO2 are known to have different chemical reactivity; in particular the {001} facets which truncates the bi-tetrahedral anatase morphology are reported to be more reactive than the usually dominant {101} facets. Anatase TiO2 thin films were deposited by reactive DC magnetron sputtering in Ar/O2 atmosphere and were characterized using Rietveld refined grazing incidence X-ray diffraction, atomic force microscopy and UV/Vis spectroscopy. By varying the partial O2 pressure in the deposition chamber, the degree of orientation of the grains in the film could be systematically varied with preferred <001> orientation changing from random upto 39% as determined by March-Dollase method. The orientation of the films is shown to correlate with their reactivity, as measured by photo-degradation of methylene blue in water solutions. The results have implications for fabrication of purposefully chemically reactive thin TiO2 films prepared by sputtering methods.



    Journal of Physics: Conference Series, vol. 559, 2014, United Kingdom, IOP Publishing, ISSN 1742-6596

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