Autors: Stefanov, B. I., Österlund, L.
Title: Tuning the photocatalytic activity of anatase TiO2 thin films by modifying the preferred< 001> grain orientation with reactive DC magnetron sputtering
Keywords: TiO2, photocatalysis, DC magnetron sputtering, preferred orientation, (001) facets

Abstract: Anatase thin films were deposited by DC reactive magnetron sputtering on glass substrates at 20 mTorr pressure in a flow of an Ar and O2 gas mixture. The O2 partial pressure was varied to obtain two sets of films with different stoichiometry. The structure and morphology of the films were characterized by secondary electron microscopy, atomic force microscopy, and grazing-angle X-ray diffraction complemented by Rietveld refinement. The as-deposited films were amorphous. Post-annealing in air resulted in polycrystalline anatase film structures. The films sputtered at higher O2 pressure showed a preferential orientation in the< 001> direction, which was associated with particle surfaces exposing highly reactive {001} facets. Films sputtered at lower O2 pressure were associated with random distribution. Photocatalytic degradation measurements using methylene blue dye showed that <001> oriented films exhibited approximately 30% higher reactivity.

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    Вид: статия в списание, публикация в издание с импакт фактор, публикация в реферирано издание, индексирана в Scopus и Web of Science