Autors: Gjosheva, S, R., Denishev, K. H.
Keywords: MEMS, Si-Al Termocouple, Thermocouple sensor battery, Sensitivity

Abstract: There are several possibilities for creating temperature sensors. Different principles and technological processes and sequences could be used. One of the simplest constructions is that, using thermocouples. In this case, different contact materials could be used. The choice is made by estimation of the chosen technology, the availability of technological equipment and materials, the application of the device, the parameters obtained by the sensor. In this case, a semiconductor sensor is designed. One of the materials, participated in the thermocouple is silicon (Si) of the base wafer.


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ELECTRONICS’ 2005,21 – 23 September, vol. 5, pp. 168-173, 2005, Bulgaria,

Вид: пленарен доклад в международен форум