Autors: Denishev, K. H., Krumova, Z, E.
Keywords: MEMS, Thermal microactuator, Heatuator, Surface micromachining

Abstract: The greatest promise of microelectromechanical systems (MEMS) lies in the ability to produce mechanical motion on a small scale. Such devices are typically low power and fast, taking advantage of such microscale phenomena as strong electrostatic forces and rapid thermal responses. A microactuator is the key device for the MEMS to perform physical functions. Thermal actuators can generate relatively large force and displacement at low actuating voltage. The deflection can linearly increase, as the control voltage is increased within a large range. Potential applications are switching of


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ELECTRONICS’ 2005,21 – 23 September, vol. 5, pp. 162-167, 2005, Bulgaria,

Вид: пленарен доклад в международен форум