Оригинал (Original)
Автори: Симонов В., Титова-Костуркова, Т. П.
Заглавие: НОВИ ТЕХНОЛОГИИ И МАТЕРИАЛИ ЗА ИЗГРАЖДАНЕ НА СЕНЗОРНИ ЕЛЕМЕНТИ
Ключови думи: Sensors, Materials, Modeling, Design, Characteristics

Абстракт: This publication reviews the latest development in materials and technologies used to build sensor elements. It covers some main types of sensors that are most widely used in automation and data collection for automatic and other measurement systems. The review of the publications is summarized as brief information regarding technologies, materials, methods, and achieved results and improvements from the proposed innovations. Attention is paid to some sensors with improved static and dynamic characteristics. A summary is made of the directions of development in the field.

Библиография

  1. Keck, A.; Sawodny, O.; Gronle, M.; Haist, T.; Osten W., 2016, Active Compensation of Dynamic Errors in a Coordinate-Measuring Machine, IFAC-PapersOnLine Active Compensation of Dynamic Errors in a Coordinate-Measuring Machine* Author links open overlay panelAlexander Keck *, Oliver Sawodny *, Marc Gronle **, Tobias Haist **, Wolfgang Osten ** Show more Add to Mendeley Share Cite https://doi.org/10.1016/j.ifacol.2016.10.672 Get rights and content Complimentary access Abstract: Measuring systems for production quality control face increasing demands in both measurement velocity and accuracy The undesired dynamic effects of measuring machines pose more stringent limits to the measurement velocity than modern optical sensors for surface metrology for example chromatic confocal point sensors. These dynamics are investigated at an exemplary coordinate measuring machine and their negative effects on the measured values are described. A compensation system for the reduction of the induced errors based on internal deviation sensors is proposed and investigated. Subsequently a dynamic model for the machine’s dominant dynamic effects is identified in order to transfer the compensation system to machines without internal deviation sensors. Previous article in issue Next article in issue Keywords Precision measurements Mechanisms Micro Nano Mechatronic Systems Motion Control Product quality Control precision Control applications View PDF REFERENCES Chang et al., 2007 Chang, D. and Spence, A. (2007). CMM dynamic error analysis, control and compensation. In Proc. of the ASPE Annual Meeting. Google Scholar Cheng et al., 2009 Cheng, C., Zurong, Q., and Xingfei, L. (2009). Prediction and compensation of dynamic errors for coordinate measuring machines. In Proc. of the International Conference on Electronic Measurement and Instruments, 2– 707 – 2–712. Google Scholar de Nijs et al., 1988 J. de Nijs, M. Lammers, P. Schellekens, A. van der Wolf Modelling of a coordinate measuring machine for analysis of its dynamic behaviour Annals of the CIRP, 37 (1) (1988), pp. 507-510 View PDFView articleView in ScopusGoogle Scholar Dong et al., 2002 C. Dong, C. Zhang, B. Wang, G. Zhang Prediction and compensation of dynamic errors for coordinate measuring machines ASME Journal of Manufacturing Science and Engineering, 124 (2002), pp. 509-514 View in ScopusGoogle Scholar Dong et al., 2003 C. Dong, C. Zhang, B. Wang, G. Zhang Reducing the dynamic errors of coordinate measuring machines ASME Journal of Mechanical Design, 125 (2003), pp. 831-839 View in ScopusGoogle Scholar Gronle et al., 2013 Gronle, M., Lyda, W., and Osten, W. (2013). Model-based, active inspection of three-dimensional objects using a multi-sensor measurement system. In Proc. SPIE, volume 8788, 87880Y–87880Y–9. Google Scholar Haist et al., 2014 T. Haist, S. Dong, T. Arnold, M. Gronle, W. Osten Multi-image position detection Optics Express, 22 (12) (2014), pp. 14450-14463 doi:10.1364/OE.22.014450 View in ScopusGoogle Scholar Keck et al., 2015 A. Keck, K.L. Knierim, O. Sawodny SAMMY - an algorithm for efficient computation of a smooth path for reference trajectory generation 6th International Conference on Automation, Robotics and Applications (ICARA), 2015 (2015), pp. 110-115 doi:10.1109/ ICARA.2015.7081133 CrossrefView in ScopusGoogle Scholar Keck et al., 2014 Keck, A. and Sawodny, O. (2014). Automation and control of a multi-sensor measuring system for quality inspection of technical surfaces. In Proc. of the 13th International Conference on Control, Automation, Robotics and Vision. Google Scholar Knierim et al., 2012 Knierim, K. and Sawodny, O. (2012). Real-time trajectory generation for three-times continuous trajectories. In Proc. of the 7th IEEE Conference on Industrial Electronics and Applications (ICIEA), 1462–1467. doi:10. 1109/ICIEA.2012.6360954. Google Scholar Liu et al., 2009 J. Liu, S. Hao, J. Liu, M. Hao, Z. Tang A study on the model of 3d-coordinate measuring machine dynamic characteristic IEEE International Conference on Robotics and Biomimetics (2009), pp. 1325-1328 doi:10.1109/ROBIO.2009.4913192 View in ScopusGoogle Scholar Mu and Ngoi, 1999 Y. Mu, B. Ngoi Dynamic error compensation of coordinate measuring machines for high-speed measurement International Journal of Advanced Manufacturing Technology, 15 (1999), pp. 810-814 View in ScopusGoogle Scholar Pereira and Hocken, 2007 P. Pereira, R. Hocken Characterization and compensation of dynamic errors of a scanning coordinate measuring machine Precision Engineering, 31 (2007), pp. 22-32 View PDFView articleView in ScopusGoogle Scholar Ruppel et al., 2008 T. Ruppel, N. Zimmert, J. Zimmermann, O. Sawodny Kinodynamic planning - an analytical approximation with Cn polynomials for industrial application Proc. of the 17th IEEE International Conference on Control Applications (2008), pp. 528-533 CrossrefView in ScopusGoogle Scholar Weekers and Schellekens, 1995 W. Weekers, P. Schellekens Assessment of dynamic errors of cmms for fast probing Annals of the CIRP, 44 (1) (1995), pp. 469-474 View PDFView articleView in ScopusGoogle Scholar Weekers and Schellekens, 1997 W. Weekers, P. Schellekens Compensation for dynamic errors of coordinate measuring machines Measurement, 20 (3) (1997), pp. 197-209 View PDFView articleView in ScopusGoogle Scholar Cited by (6) Adaptive chattering-free terminal sliding mode control for a coordinate measuring machine system 2021, Computers and Electrical Engineering Show abstract Highly accurate imaging based position measurement using holographic point replication 2021, Measurement Journal of the International Measurement Confederation Citation Excerpt : For highly dynamic relative movements between TCP and WP it is difficult to guarantee this constancy and also to ensure highly constant orientation of the moving part (in many cases the TCP) to the mechanical axis of the translation stage, where the measurement system is. High acceleration together with finite stiffness of components can lead to deviations between the actual and the measured relative position [2–4]. Furthermore, most optical encoders and interferometers that are built into the drive axes have inherent disadvantages that complicate their application, namely the packaging to prevent pollution, vibration sensitivity (interferometers) as well as the need for continuous signal sampling. Show abstract A new method for examining the dynamic performance of coordinate measuring machines 2019, Measurement Journal of the International Measurement Confederation Citation Excerpt : This is described in detail in [10]. The second group of methods for examining the dynamic performance of CMMs, which are much more complicated to be implemented, are the methods utilising external reference devices, i.e. laser interferometer [11], external measuring transducers [12] or piezoelectric translator coupled with a measuring transducer, most often – a capacitive one [13]. These examinations are usually very expensive to be realized as they require the use of the expensive measuring devices. Show abstract Determination of the single point precision associated with tactile gear measurements in scanning mode 2020, Journal of Sensors and Sensor Systems Gaussian process based multi-rate observer for the dynamic positioning error of a measuring machine 2019, 2019 18th European Control Conference Ecc 2019 The influence of machine-part measuring strategies for coordinate measuring devices on the precision of the measured values 2018, Acta Polytechnica Hungarica * This work was supported by the DFG (Deutsche Forschungs-gemeinschaft / German Research Foundation) under grants SA 847/16-1, OS 111/42-1. View Abstract © 2016, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. Part of special issue 7th IFAC Symposium on Mechatronic Systems MECHATRONICS 2016: Loughborough University, Leicestershire, UK, 5—8 September 2016, <>, IFAC-PapersOnLine Volume 49, Issue 21, 2016, Pages 636-641
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  5. Saleem, H.; Downey, A.; Laflamme, S.; Kollosche, M.; Ubertini, F., 2015, Investigation of Dynamic Properties of a Novel Capacitive-based Sensing Skin for Nondestructive Testing, Materials Evaluation, том 73(10), стр. стр. 1384-1391
  6. Arora, N.; Singh, P.; Kumar, R.; Pratap, R.; Naik, A., 2024, Mixed Nonlinear Response and Transition of Nonlinearity in a Piezoelectric Membrane, ACS Applied Electronic Materials, том 6(1), стр. стр. S1-S16
  7. Langfelder, G. ; Dellea, S.; Aresi, N. ; Longon A., 2014, Linearity of Piezoresistive Nano- gauges for MEMS Sensors, Procedia Engineering, том 87, стр. стр. 1469- 1472
  8. Shen Z.; Zhang Z.; Zhang N.; Li J.; Zhou P.; Hu F.; Rong Y.; Lu B.; Gu G., 2022, High-Stretchability, Ultralow-Hysteresis ConductingPolymer Hydrogel Strain Sensors for Soft Machines, Adv Mater, том 34(32), стр. стр.
  9. Michelis, F.; Bodelot, L.; Bonnassieux, Y.; Lebental B., 2015, Highly reproducible, hysteresis-free, flexible strain sensors by inkjet printing of carbon nanotubes, Carbon, том 95, стр. стр. 1020-1026
  10. Jin, Z.; Li, Y.; Fan, D.; Tu, C.; Wang, X.; Dang, S., 2023, Calibration Experiment and Temperature Compensation Method for the Thermal Output of Electrical Resistance Strain Gauges in Health Monitoring of Structures., Symmetry, том 15, стр. стр. 1066
  11. Lanzolla, A.M.L.; Attivissimo, F.; Percoco, G.; Ragolia, M.A.; Stano, G.; Di Nisio, A., 2022, Additive Manufacturing for Sensors: Piezoresistive Strain Gauge with Temperature Compensation, Appl. Sci., том 12, стр. стр. 8607
  12. Lu, H.; Shi, W.; Zhang, J.; Chen, A.; Guan, W.; Lei, C.; Greer, J.; Boriskina, S.; Yu, G., 2022, Tailoring the Desorption Behavior of Hygroscopic Gels for Atmospheric Water Harvesting in Arid Climates, Advanced Materials, том 34, стр. стр.
  13. Harun, N.; Ali, R.; Ali, Ab M. M.; Yahya, M. Zu A., 2012, Resistive-type Humidity Sensor Based on CA-NH4BF4-PEG600 Thin Films, Physics Procedia, том 25, стр. стр. 221-226
  14. Lee H.; Lee S.; Jung S.; Lee J., 2011, Nano-Grass Polyimide-Based Humidity Sensors, Sens. Actuators B Chem., том 154, стр. стр. 2-8
  15. Gu L., Zheng K., Zhou Y., Li J., Mo X., Patzke G.R., Chen G., 2011, Humidity Sensors Based on ZnO/TiO2 Core/shell Nanorod Arrays with Enhanced Sensitivity., Sens. Actuators B Chem, том 159, стр. стр. 1-7
  16. Zeng, T.; Lu, Y.; Liu, Y.; Yang, H.; Bai, Y.; Hu, P., Li, Zh.; Zhang, Zh.; Tan, J., 2015, A Capacitive Sensor for the Measurement of Departure From the Vertical Movement, IEEE Transactions on Instrumentation and Measurement, том 65, стр. стр. 1-9
  17. Bai Y, Lu Y, Hu P, Wang G, Xu J, Zeng T, Li Z, Zhang Z, Tan J., 2016, Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window, Sensors (Basel), том 16(5), стр. стр.
  18. Ferri, G.; Parente, F.R. ;Stornelli, V.; Barile, G.; Pantoli L., 2016, Automatic Bridge-based Interface for Differential Capacitive Full Sensing, Procedia Engineering, том 168, стр. стр. 585-1588
  19. Paun, M.-Al.; Sallese, J.-M.; Kayal, M., 2010, Geometry influence on the Hall effect devices performance, UPB Scientific Bulletin, Series A: Applied Mathematics and Physics, том 72, стр. стр.
  20. Paun, M.-Al.; Sallese, J.- M.; Kayal, M., 2013, Hall Effect Sensors Design, Integration and Behavior Analysi, Journal of Sensor and Actuator Networks, том 2, стр. стр. 85-97
  21. Wouters,C. ; Vranković, V.; Rössler, C. ; Sidorov, S. ; Ensslin, K. ; Wegscheider, W.; Hierold,C., 2016, Design and fabrication of an innovative three-axis Hall sensor, ensors and Actuators A: Physical, том 237, стр. стр. 62-71
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Издание

INTERNATIONAL SCIENTIFIC CONFERENCE, 2025, България, Габрово, ISSN 3033-1404
Autors: Симонов В.
Title:
Keywords:

Abstract:

References

  1. Keck, A.; Sawodny, O.; Gronle, M.; Haist, T.; Osten W., 2016, Active Compensation of Dynamic Errors in a Coordinate-Measuring Machine, IFAC-PapersOnLine Active Compensation of Dynamic Errors in a Coordinate-Measuring Machine* Author links open overlay panelAlexander Keck *, Oliver Sawodny *, Marc Gronle **, Tobias Haist **, Wolfgang Osten ** Show more Add to Mendeley Share Cite https://doi.org/10.1016/j.ifacol.2016.10.672 Get rights and content Complimentary access Abstract: Measuring systems for production quality control face increasing demands in both measurement velocity and accuracy The undesired dynamic effects of measuring machines pose more stringent limits to the measurement velocity than modern optical sensors for surface metrology for example chromatic confocal point sensors. These dynamics are investigated at an exemplary coordinate measuring machine and their negative effects on the measured values are described. A compensation system for the reduction of the induced errors based on internal deviation sensors is proposed and investigated. Subsequently a dynamic model for the machine’s dominant dynamic effects is identified in order to transfer the compensation system to machines without internal deviation sensors. Previous article in issue Next article in issue Keywords Precision measurements Mechanisms Micro Nano Mechatronic Systems Motion Control Product quality Control precision Control applications View PDF REFERENCES Chang et al., 2007 Chang, D. and Spence, A. (2007). CMM dynamic error analysis, control and compensation. In Proc. of the ASPE Annual Meeting. Google Scholar Cheng et al., 2009 Cheng, C., Zurong, Q., and Xingfei, L. (2009). Prediction and compensation of dynamic errors for coordinate measuring machines. In Proc. of the International Conference on Electronic Measurement and Instruments, 2– 707 – 2–712. Google Scholar de Nijs et al., 1988 J. de Nijs, M. Lammers, P. Schellekens, A. van der Wolf Modelling of a coordinate measuring machine for analysis of its dynamic behaviour Annals of the CIRP, 37 (1) (1988), pp. 507-510 View PDFView articleView in ScopusGoogle Scholar Dong et al., 2002 C. Dong, C. Zhang, B. Wang, G. Zhang Prediction and compensation of dynamic errors for coordinate measuring machines ASME Journal of Manufacturing Science and Engineering, 124 (2002), pp. 509-514 View in ScopusGoogle Scholar Dong et al., 2003 C. Dong, C. Zhang, B. Wang, G. Zhang Reducing the dynamic errors of coordinate measuring machines ASME Journal of Mechanical Design, 125 (2003), pp. 831-839 View in ScopusGoogle Scholar Gronle et al., 2013 Gronle, M., Lyda, W., and Osten, W. (2013). Model-based, active inspection of three-dimensional objects using a multi-sensor measurement system. In Proc. SPIE, volume 8788, 87880Y–87880Y–9. Google Scholar Haist et al., 2014 T. Haist, S. Dong, T. Arnold, M. Gronle, W. Osten Multi-image position detection Optics Express, 22 (12) (2014), pp. 14450-14463 doi:10.1364/OE.22.014450 View in ScopusGoogle Scholar Keck et al., 2015 A. Keck, K.L. Knierim, O. Sawodny SAMMY - an algorithm for efficient computation of a smooth path for reference trajectory generation 6th International Conference on Automation, Robotics and Applications (ICARA), 2015 (2015), pp. 110-115 doi:10.1109/ ICARA.2015.7081133 CrossrefView in ScopusGoogle Scholar Keck et al., 2014 Keck, A. and Sawodny, O. (2014). Automation and control of a multi-sensor measuring system for quality inspection of technical surfaces. In Proc. of the 13th International Conference on Control, Automation, Robotics and Vision. Google Scholar Knierim et al., 2012 Knierim, K. and Sawodny, O. (2012). Real-time trajectory generation for three-times continuous trajectories. In Proc. of the 7th IEEE Conference on Industrial Electronics and Applications (ICIEA), 1462–1467. doi:10. 1109/ICIEA.2012.6360954. Google Scholar Liu et al., 2009 J. Liu, S. Hao, J. Liu, M. Hao, Z. Tang A study on the model of 3d-coordinate measuring machine dynamic characteristic IEEE International Conference on Robotics and Biomimetics (2009), pp. 1325-1328 doi:10.1109/ROBIO.2009.4913192 View in ScopusGoogle Scholar Mu and Ngoi, 1999 Y. Mu, B. Ngoi Dynamic error compensation of coordinate measuring machines for high-speed measurement International Journal of Advanced Manufacturing Technology, 15 (1999), pp. 810-814 View in ScopusGoogle Scholar Pereira and Hocken, 2007 P. Pereira, R. Hocken Characterization and compensation of dynamic errors of a scanning coordinate measuring machine Precision Engineering, 31 (2007), pp. 22-32 View PDFView articleView in ScopusGoogle Scholar Ruppel et al., 2008 T. Ruppel, N. Zimmert, J. Zimmermann, O. Sawodny Kinodynamic planning - an analytical approximation with Cn polynomials for industrial application Proc. of the 17th IEEE International Conference on Control Applications (2008), pp. 528-533 CrossrefView in ScopusGoogle Scholar Weekers and Schellekens, 1995 W. Weekers, P. Schellekens Assessment of dynamic errors of cmms for fast probing Annals of the CIRP, 44 (1) (1995), pp. 469-474 View PDFView articleView in ScopusGoogle Scholar Weekers and Schellekens, 1997 W. Weekers, P. Schellekens Compensation for dynamic errors of coordinate measuring machines Measurement, 20 (3) (1997), pp. 197-209 View PDFView articleView in ScopusGoogle Scholar Cited by (6) Adaptive chattering-free terminal sliding mode control for a coordinate measuring machine system 2021, Computers and Electrical Engineering Show abstract Highly accurate imaging based position measurement using holographic point replication 2021, Measurement Journal of the International Measurement Confederation Citation Excerpt : For highly dynamic relative movements between TCP and WP it is difficult to guarantee this constancy and also to ensure highly constant orientation of the moving part (in many cases the TCP) to the mechanical axis of the translation stage, where the measurement system is. High acceleration together with finite stiffness of components can lead to deviations between the actual and the measured relative position [2–4]. Furthermore, most optical encoders and interferometers that are built into the drive axes have inherent disadvantages that complicate their application, namely the packaging to prevent pollution, vibration sensitivity (interferometers) as well as the need for continuous signal sampling. Show abstract A new method for examining the dynamic performance of coordinate measuring machines 2019, Measurement Journal of the International Measurement Confederation Citation Excerpt : This is described in detail in [10]. The second group of methods for examining the dynamic performance of CMMs, which are much more complicated to be implemented, are the methods utilising external reference devices, i.e. laser interferometer [11], external measuring transducers [12] or piezoelectric translator coupled with a measuring transducer, most often – a capacitive one [13]. These examinations are usually very expensive to be realized as they require the use of the expensive measuring devices. Show abstract Determination of the single point precision associated with tactile gear measurements in scanning mode 2020, Journal of Sensors and Sensor Systems Gaussian process based multi-rate observer for the dynamic positioning error of a measuring machine 2019, 2019 18th European Control Conference Ecc 2019 The influence of machine-part measuring strategies for coordinate measuring devices on the precision of the measured values 2018, Acta Polytechnica Hungarica * This work was supported by the DFG (Deutsche Forschungs-gemeinschaft / German Research Foundation) under grants SA 847/16-1, OS 111/42-1. View Abstract © 2016, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. Part of special issue 7th IFAC Symposium on Mechatronic Systems MECHATRONICS 2016: Loughborough University, Leicestershire, UK, 5—8 September 2016, <>, IFAC-PapersOnLine Volume 49, Issue 21, 2016, Pages 636-641
  2. Chen, G.; Yan, X.; Cai, J.; Guo, H., 2018, Hysteresis nonlinear modeling and compensation of piezoelectric ceramic sensors in micro measurement systems, Measurement Science and Technology, том 29(9), стр. стр.
  3. Ismail, M.; Ikhouane, F.; Rodellar, J., 2009, The Hysteresis Bouc- Wen Model, a Survey, Archives of Computational Methods in Engineering, том 16, стр. стр. 161-188
  4. bdul-Hussain, G.; Holderbaum, W.; Theodoridis, T.; Wei, G, 2023, Modified Nonlinear Hysteresis Approach for a Tactile Sensor, Sensors, том 23(16), стр. стр. 7293
  5. Saleem, H.; Downey, A.; Laflamme, S.; Kollosche, M.; Ubertini, F., 2015, Investigation of Dynamic Properties of a Novel Capacitive-based Sensing Skin for Nondestructive Testing, Materials Evaluation, том 73(10), стр. стр. 1384-1391
  6. Arora, N.; Singh, P.; Kumar, R.; Pratap, R.; Naik, A., 2024, Mixed Nonlinear Response and Transition of Nonlinearity in a Piezoelectric Membrane, ACS Applied Electronic Materials, том 6(1), стр. стр. S1-S16
  7. Langfelder, G. ; Dellea, S.; Aresi, N. ; Longon A., 2014, Linearity of Piezoresistive Nano- gauges for MEMS Sensors, Procedia Engineering, том 87, стр. стр. 1469- 1472
  8. Shen Z.; Zhang Z.; Zhang N.; Li J.; Zhou P.; Hu F.; Rong Y.; Lu B.; Gu G., 2022, High-Stretchability, Ultralow-Hysteresis ConductingPolymer Hydrogel Strain Sensors for Soft Machines, Adv Mater, том 34(32), стр. стр.
  9. Michelis, F.; Bodelot, L.; Bonnassieux, Y.; Lebental B., 2015, Highly reproducible, hysteresis-free, flexible strain sensors by inkjet printing of carbon nanotubes, Carbon, том 95, стр. стр. 1020-1026
  10. Jin, Z.; Li, Y.; Fan, D.; Tu, C.; Wang, X.; Dang, S., 2023, Calibration Experiment and Temperature Compensation Method for the Thermal Output of Electrical Resistance Strain Gauges in Health Monitoring of Structures., Symmetry, том 15, стр. стр. 1066
  11. Lanzolla, A.M.L.; Attivissimo, F.; Percoco, G.; Ragolia, M.A.; Stano, G.; Di Nisio, A., 2022, Additive Manufacturing for Sensors: Piezoresistive Strain Gauge with Temperature Compensation, Appl. Sci., том 12, стр. стр. 8607
  12. Lu, H.; Shi, W.; Zhang, J.; Chen, A.; Guan, W.; Lei, C.; Greer, J.; Boriskina, S.; Yu, G., 2022, Tailoring the Desorption Behavior of Hygroscopic Gels for Atmospheric Water Harvesting in Arid Climates, Advanced Materials, том 34, стр. стр.
  13. Harun, N.; Ali, R.; Ali, Ab M. M.; Yahya, M. Zu A., 2012, Resistive-type Humidity Sensor Based on CA-NH4BF4-PEG600 Thin Films, Physics Procedia, том 25, стр. стр. 221-226
  14. Lee H.; Lee S.; Jung S.; Lee J., 2011, Nano-Grass Polyimide-Based Humidity Sensors, Sens. Actuators B Chem., том 154, стр. стр. 2-8
  15. Gu L., Zheng K., Zhou Y., Li J., Mo X., Patzke G.R., Chen G., 2011, Humidity Sensors Based on ZnO/TiO2 Core/shell Nanorod Arrays with Enhanced Sensitivity., Sens. Actuators B Chem, том 159, стр. стр. 1-7
  16. Zeng, T.; Lu, Y.; Liu, Y.; Yang, H.; Bai, Y.; Hu, P., Li, Zh.; Zhang, Zh.; Tan, J., 2015, A Capacitive Sensor for the Measurement of Departure From the Vertical Movement, IEEE Transactions on Instrumentation and Measurement, том 65, стр. стр. 1-9
  17. Bai Y, Lu Y, Hu P, Wang G, Xu J, Zeng T, Li Z, Zhang Z, Tan J., 2016, Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window, Sensors (Basel), том 16(5), стр. стр.
  18. Ferri, G.; Parente, F.R. ;Stornelli, V.; Barile, G.; Pantoli L., 2016, Automatic Bridge-based Interface for Differential Capacitive Full Sensing, Procedia Engineering, том 168, стр. стр. 585-1588
  19. Paun, M.-Al.; Sallese, J.-M.; Kayal, M., 2010, Geometry influence on the Hall effect devices performance, UPB Scientific Bulletin, Series A: Applied Mathematics and Physics, том 72, стр. стр.
  20. Paun, M.-Al.; Sallese, J.- M.; Kayal, M., 2013, Hall Effect Sensors Design, Integration and Behavior Analysi, Journal of Sensor and Actuator Networks, том 2, стр. стр. 85-97
  21. Wouters,C. ; Vranković, V.; Rössler, C. ; Sidorov, S. ; Ensslin, K. ; Wegscheider, W.; Hierold,C., 2016, Design and fabrication of an innovative three-axis Hall sensor, ensors and Actuators A: Physical, том 237, стр. стр. 62-71
  22. Lozanova, S.; Ivanov, A.; Roumenin Ch., 2011, A Hall Effect Device with Enhanced Sensitivity, Procedia Engineering, том 25, стр. стр. 543-546
  23. Silva, D., 2022, Modeling the Transient Response of Thermal Circuits, Appl. Sci., том 12(24), стр. стр. 12555
  24. Davies, M. A.; Ueda, T.; M'saoubi, R.; Mullany, B.,; Cooke, A. L., 2007, On the measurement of temperature in material removal processes., CIRP annals, том 56(2), стр. стр. 581- 604
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, 2025, Bulgaria, ISSN 3033-1404

Вид: публикация в международен форум, публикация в реферирано издание