Autors: Tabakov, T. B., Denishev, K. H.
Title: MEANDER-LINE PIEZOELECTRIC ACTUATOR
Keywords: MEMS, Linear actuator, Meander-line actuator, Piezoelectric layer

Abstract: A novel type of microactuator for linear displacements is presented. For the electrical to mechanical energy transformation it uses piezoelectric thin films. To produce linear displacement, this actuator uses a folded (meander-line geometry) path. The surface micromachining procedure is proposed. A particular set of dimensions is chosen and the actuator is designed. For quantitatively estimation of the performance of the actuator, an electromechanical model is developed and used. The results from the evaluation of the structure of meander-line actuator are shown. For producing the micro

References

  1. Robbins,W., Polla, D., Tamagawa, T., Glumac, E, D.,Judy, W.,, 2001, Linear motion microactuators using piezoelectric thin films, USA, Department of Electrical Engineering, University of Minnesota
  2. Robbins,W., Polla L.,Daniel, E., Glumac, E.,, 2001, Compact, highdisplacement piezoelectric actuator with potential micromechanical applications, USA, Department of Electrical Engineering, University of Minnesota
  3. Maluf, N.,, 2003, An Introduction to Microelectromechanical Systems Engineering, Boston - London, Artech House

Issue

ELECTRONICS’ 2005,21 – 23 September, vol. 5, pp. 156-161, 2005, Bulgaria,

Вид: пленарен доклад в международен форум