Autors: Iordanov, R. S., Boiadjiev, I, S., Minkova Rasovska, M. M.
Title: RF REACTIVE SPUTTERING OF MOO3 THIN FILMS FOR SENSOR APPLICATIONS
Keywords: thin films, MoO3, reactive sputtering, gas sensor

Abstract: The research was focused on the sensing behavior of sputtered thin films of molybdenum trioxide (MoO3). Films of various thickness were deposited on quartz resonators. RF sputtering technology for deposition of MoO3 thin films was elaborated on. The method of reactive sputtering of molybdenum target in the presence of oxygen as reactive gas was used. Technological parameters were optimized to obtain films with good quality on different substrates. The influence of technological conditions during deposition and the consequent thermal treatment in a different medium were studied. The film

References

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Issue

ELECTRONICS’ 2005,21 – 23 September, vol. 5, pp. 141-145, 2005, Bulgaria,

Вид: пленарен доклад в международен форум