Autors: Banchelli, L. F., Stavrov V., Ganev, B. T., Nikolov, N. L., Todorov, T. S.
Title: Investigation of Triple-Microcantilever Sensor for Ultra-Low Mass-Sensing Applications †
Keywords: piezoresistor, triple-microcantilever sensor, ultralow mass detection, vibration, virus sensing

Abstract: This paper discusses a new method and sensor for the detection of ultra-low masses, such as those of viruses and biomarkers. The sensor contains three microcantilevers with a common substrate that vibrates. The detection method processes phase-shifted signals from Wheatstone bridges from connected piezoresistors formed on the vibrating microcantilevers and passive resistors on the rigid substrate. Each microcantilever has a gold pad that can be either active or passive. When a mass is detected, the shape of the amplitude–frequency response changes. The proposed method has high mass sensitivity and can respond up to one minute, which is an important challenge for nanocantilever sensors.

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Issue

Engineering Proceedings, vol. 100, 2025, Albania, https://doi.org/10.3390/engproc2025100060

Вид: статия в списание, публикация в реферирано издание, индексирана в Scopus