Autors: Alexandrova, S. P., Maslyanitsyn, I.
Title: OPTICAL PROPERTIES OF PECVD a-SI:H LAYER ON GLASS SUBSTRATE
Keywords: Hydrogenated Silicon, Second Harmonic Generation

Abstract: In the present paper thin a-Si:H films deposited onto glass substrates are characterized using linear (transmission) and nonlinear (second harmonic generation (SHG)) optical techniques. The refractive index at both fundamental and SHG wavelength are estimated. Complicated dependence of SHG on film thickness and deposition temperature is found. The origin of the nonlinear properties is discussed.

References

  1. Susuzi, K.,, 1991, Amorphous and Microcystalline Semiconductor Devices: Optoelectronic Devices, Boston, MA, Artech House
  2. Gross, A., Vetterl, O., Lambertz, A., Finger, F., Wagner, H., Dasgupta, A.,, 1950, Appl. Phys. Lett., Appl. Phys. Lett., Volume 79, pp. 2841-2845
  3. Strotzer, M., Gmeinwieser, J, K., Volk, M., Frund, R., Seitz, J., Feuerbach, S.,, 1998, Invest. Radio, Invest. Radio, Volume 33, pp. 98–103
  4. Dolgova, T, V., Fedyanin, A, A., Aktsipetrov, O, A.,, 2002, Phys. Rev, Phys. Rev, Volume 66, pp. 33305-33313
  5. Ohloff, C., Lübke, G., Meyer, C., Kurz, H.,, 1997, Phys. Rev., Phys. Rev., Volume 55, pp. 4596-4608
  6. Govorkov, S, V., Emel’anov, V, I., Koroteev, N, I., Petrov, G, I., Shumay, I, L., Yakovlev, V, V.,, 1989, Opt. Soc. Am., Opt. Soc. Am., Volume 6, pp. 1117-1124
  7. Aguas, H., Fortunato, E., Silva, V., Pereira, L., Martins, R.,, 2002, Thin Solid Films, Thin Solid Films, Volume 403-404, pp. 26-32
  8. Alexandrova, S., Danesh, P., Maslyanitsyn, I, A.,, 2000, Phys. Rev, Phys. Rev, Volume 61, pp. 11136-
  9. Elliot, S, R.,, 1989, Advances in Physics, Advances in Physics, Volume 38, pp. 1- 69
  10. Rinnert, H., Vergnat, M.,, 2002, Thin Solid Films, Thin Solid Films, Volume 403-404, pp. 153-1557
  11. Jun, K, H., Lim, K, S., Kim, S, Y., Kim, S, J.,, 2000, Non-Cryst. Solids, Non-Cryst. Solids, Volume 275, pp. 59-64
  12. Aktsipetrov, O, A., Baranova, I, M., Ilinskii, Yu, A.,, 1986, Sov Phys. JETP, Sov Phys. JETP, Volume 64, pp. 167- 178
  13. Berntsen, A, J, M., W Van Sark, G, J, M., Van der Weg, W, F.,, 1995, Appl. Phys, Appl. Phys, Volume 78, pp. 1964-1967
  14. Alexandrova, S., Danesh, P., Maslyanitsyn, I, A.,, 2002, Vaccum, Vaccum, Volume 86, pp. 391-395
  15. Haueisen, D, C.,, 1972, Solid St. Commun., Solid St. Commun, Volume 10, pp. 1313-1315

Issue

ELECTRONICS’ 2005,21 – 23 September, vol. 5, pp. 44-49, 2005, Bulgaria,

Вид: пленарен доклад в международен форум