Autors: Delibozov, N. G., Radonov, R. I., Hristov, M. H.
Title: Design and Fabrication of ”Matrix” MEMS Device
Keywords: MEMS, microelectronics technology, sidewall embedded

Abstract: This paper presents the design and development of library elements used for design and fabrication of MEMS devices and MEMS based, piezoresistive sensor for microforce measurement. The output of the physical design is foundry ready and can be sent to any foundry in CIF or GDS ІІ format. Boron diffusion process combined with deep reactive ion etching (DRIE) technique is used to form the side direction force sensors. The monolithic MEMS prototypes have been micro machined.


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Annual Journal of Electronics, vol. 8, pp. 32-35, 2014, Bulgaria, ISSN 1314-0078

Вид: статия в списание, публикация в реферирано издание