Е-Публикации
Технически университет - София

Abstract: Featured Application: Biomedical or environmental monitoring sensors. The response characteristics of carbyne-enriched surface-acoustic-wave (SAW)-based gas sensors utilizing meander and rectangular microheater topologies were investigated to assess their desorption and recovery properties. Comparative analysis of contact resistance and interface capacitance before and after heating revealed minimal deviation in contact resistance, signifying strong thermal stability in the carbyne-enriched layer. However, the interface capacitance varied with the microheater size. Our analysis reveals that a small meander microheater configuration (line width: 300 µm) facilitates efficient sensor recovery at ethanol concentration measurements in the range of 180–680 ppm, maintaining a low deviation in time delay across different concentrations (~2.3%), resulting in a narrow hysteresis and linear sensor response. Conversely, the large meander microheater (line width: 450 µm) and rectangular dense microheater induce irreversible changes in the sensing structure, leading to a widened hysteresis at higher concentrations and increased power consumption. Recovery patterns display substantial deviations from initial values at different concentration levels. Higher concentrations exhibit broader hysteresis, while lower concentrations show narrower hysteresis loops, compared to the small meander microheater. The study offers insights into desorption rates, power consumption variations, and recovery behaviors related to different microheater configurations. It demonstrates the importance of microheater topology selection in tailoring recovery properties and response characteristics, contributing to the advancement of carbyne-based sensor technology.

References

1. Hooshmand S. Kassanos P. Keshavarz M. Duru P. Kayalan C.I. Kale İ. Bayazit M.K. Wearable Nano-Based Gas Sensors for Environmental Monitoring and Encountered Challenges in Optimization Sensors 2023 23 8648 10.3390/s23208648
2. Márquez-Sánchez S. Huerta-Muñoz J. Herrera-Santos J. Arrieta A.G. De la Prieta F. Gas sensing in industry. A case study: Train hangar Ad Hoc Netw. 2023 148 103205 10.1016/j.adhoc.2023.103205
3. Chen X. Leishman M. Bagnall D. Nasiri N. Nanostructured Gas Sensors: From Air Quality and Environmental Monitoring to Healthcare and Medical Applications Nanomaterials 2021 11 1927 10.3390/nano11081927 34443755
4. Sá J.P. Alvim-Ferraz M.C.M. Martins F.G. Sousa S.I. Application of the low-cost sensing technology for indoor air quality monitoring: A review Environ. Technol. Innov. 2022 28 102551 10.1016/j.eti.2022.102551
5. Laha S.R. Pattanayak B.K. Pattnaik S. Advancement of Environmental Monitoring System Using IoT and Sensor: A Comprehensive Analysis AIMS Environ. Sci. 2022 9 771 800 10.3934/environsci.2022044
6. Pham Y.L. Beauchamp J. Breath Biomarkers in Diagnostic Applications Molecules 2021 26 5514 10.3390/molecules26185514 34576985
7. Javaid M. Haleem A. Singh R.P. Rab S. Suman R. Exploring the potential of nanosensors: A brief overview Sens. Int. 2021 2 100130 10.1016/j.sintl.2021.100130
8. Gil B. Wales D. Tana H. Yeatmana E. Detection of medically relevant volatile organic compounds with graphene field-effect transistors and separated by low-frequency spectral and time signatures Nanoscale 2024 16 61 71 10.1039/D3NR04961B 38086675
9. Lim J.-B. Reddeppa M. Nam D. Pasupuleti K.S. Bak N.-H. Kim S.-G. Cho H.D. Kim M.-D. Surface acoustic device for high response NO2gas sensor using p-phenylenediamine-reduced graphene oxide nanocomposite coated on langasite Smart Mater. Struct. 2021 30 095016 10.1088/1361-665X/ac1956
10. Mujahid A. Dickert F.L. Surface Acoustic Wave (SAW) for Chemical Sensing Applications of Recognition Layers Sensors 2017 17 2716 10.3390/s17122716
11. Luo W. Fu Q. Zhou D. Deng J. Liu H. Yan G. A surface acoustic wave H2S gas sensor employing nanocrystalline SnO2thin film Sens. Act. B Chem. 2013 176 746 10.1016/j.snb.2012.10.086
12. Aleksandrova M. Kolev G. Brigadin A. Lukin A. Gas-sensing properties of a carbyne-enriched nanocoating deposited onto surface acoustic wave composite substrates with various electrode topologies Crystals 2022 12 501 10.3390/cryst12040501
13. Wu Y. Du X. Li Y. Tai H. Su Y. Optimization of temperature uniformity of a serpentine thin film heater by a two-dimensional approach Microsyst. Technol. 2019 25 69 10.1007/s00542-018-3932-0
14. Hwang W.-J. Shin K.-S. Roh J.-H. Lee D.-S. Choa S.-H. Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors Sensors 2011 11 2580 10.3390/s110302580 22163756
15. Algamili A.S. Khir M.H. Ahmed A.Y. Rabih A.A. Ba-Hashwan S.S. Alabsi S.S. Al-Mahdi O.L. Isyaku U.B. Ahmed M.G. Junaid M. Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor Micromachines 2022 13 525 10.3390/mi13040525 35457830
16. Gorokh G. Taratyn I. Fiadosenka U. Reutskaya O. Lozovenko A. Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology Chemosensors 2023 11 443 10.3390/chemosensors11080443
17. Hauser R. Reindl L. Biniasch J. High-temperature stability of LiNbO3based SAW devices Proceedings of the IEEE Symposium on Ultrasonics Honolulu, HI, USA 5–8 October 2003
18. Li M.-H. Chen C.-Y. Lu R. Yang Y. Wu T. Gong S. Temperature Stability Analysis of Thin-Film Lithium Niobate SH0 Plate Wave Resonators J. Microelectromech. Syst. 2019 28 799 10.1109/JMEMS.2019.2934126
19. Miralles V. Huerre A. Malloggi F. Jullien M.-C. A Review of Heating and Temperature Control in Microfluidic Systems: Techniques and Applications Diagnostics 2013 3 33 67 10.3390/diagnostics3010033 26835667
20. Courbat J. Canonica M. Teyssieux D. Briand D. De Rooij N.F. Design and fabrication of micro-hotplates made on a polyimide foil: Electrothermal simulation and characterization to achieve power consumption in the low mw range J. Micromech. Microeng. 2010 21 196 201 10.1088/0960-1317/21/1/015014
21. Mele L. Rossi T. Riccio M. Iervolino E. Santagata F. Irace A. Breglio G. Creemer J.F. Sarro P.M. Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity Proc. Eng. 2011 25 387 390 10.1016/j.proeng.2011.12.096
22. Souhir B. Sami G. Hekmet C.S. Abdennaceur K. Design, Simulation, and Optimization of a Meander Micro Hotplate for Gas Sensors Trans. Electr. Electron. Mater. 2016 17 189 195 10.4313/TEEM.2016.17.4.189
23. Aleksandrova M. Kolev G. Dobrikov G. Brigadin A. Lukin A. Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes Nanomaterials 2022 12 2066 10.3390/nano12122066 35745404
24. Dapeng Z. Qinghui J. Yingwei L. The effect of temperature and loading frequency on the converse piezoelectric response of soft PZT ceramics Mater. Res. Express 2017 4 125705 10.1088/2053-1591/aa9dbc
25. He Y. Xu H. Ouyang G. Yang G. Thermal properties of carbyne nanostructures Results Phys. 2022 34 105311 10.1016/j.rinp.2022.105311
26. Taqui S.N. Syed A.A. Mubarak N.M. Farade R.A. Khan M.A.M. Kalam A. Dehghani M.H. Soudagar M.E.M. Rather R.A. Shamshuddin S.Z.M. et al. Insights into isotherms, kinetics, and thermodynamics of adsorption of acid blue 113 from an aqueous solution of nutraceutical industrial fennel seed spent Sci. Rep. 2023 13 22665 10.1038/s41598-023-49471-w
27. Bhatt P. Arora A. Design of Microheater for MEMS Based Gas Sensor Thapar University Patiala, India 2014
28. Kumar V.V. Sasikala G. Design of Low Power Ni-chrome-Platinum Micro-Heater for MEMS-Based Gas Sensor in UAV Applications IJEEE 2023 10 128 137
29. Modal S.S. Roy S. Sarkar C.K. Design and electrothermal analysis of MEMS based microheater array for gas sensor using INVAR alloy Proceedings of the 2012 International Conference on Communications, Devices and Intelligent Systems (CODIS) Kolkata, India 28–29 December 2012 468 471
30. He L. Wang F. Niu G. Gong H. Yang Z. He W. Cao J. Design of Mems-Based Gas Sensor Micro Heat Plate Proceedings of the International Workshop on Materials, Chemistry and Engineering (IWMCE 2018) Xiamen, China 16–17 June 2018 610 615

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