Autors: Boyadzhiev S., Lazarova V., Rasovska, M. M., Yordanova, I. R., Yordanov, R. S.
Title: Comparison between RF and DC Magnetron Reactive Sputtered Molybdenum Oxide Thin Films for Gas sensors
Keywords: Gas sensorMolybdenum oxideQuartz crystal microbalanceReactive sputteringThin films

Abstract: This paper reports about the preparation, surface, structural and sorption characterization of as-deposited molybdenum oxide (MoO3) thin films prepared by two different techniques of reactive sputtering. The methods of radio frequency (RF) and direct current (DC) magnetron reactive sputtering were used for deposition of the films. The composition and microstructure of these thin films were studied by X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and X-ray diffraction (XRD). The films' surface was observed by a high-resolution scanning electron microscopy (HRSEM). To determine the thickness of the films as well as their refractive indices laser ellipsometry was applied. In order to study the sensing properties, films of various thickness and at different deposition rates were deposited on quartz resonators, and the quartz crystal microbalance (QCM) method was used. Applying it we built prototype QCM sensors with MoO3 sensitive films.

References

    Issue

    Journal of Optoelectronics and Advanced Materials – Rapid Communications, vol. 4, issue 10, pp. 1485 – 1488, 2010, Romania, National Institute of Optoelectronics, ISBN ISSN: 1842-6573

    Цитирания (Citation/s):
    1. Boyadjiev, S.I., Georgieva, V., Szilágyi, I.M., (...), Georgieva, B., Paskaleva, A., Comparison of ALD-grown thin ZnO films with various thicknesses for NO2 sensing,Journal of Physics: Conference Series 1492(1),012052 - 2020 - в издания, индексирани в Scopus или Web of Science

    Вид: публикация в международен форум, публикация в издание с импакт фактор, публикация в реферирано издание