Autors: Siderov V., Mladenova D., Yordanov, R. S., Milenkov V., Ohlidal M., Salyk O., Weiter M., Zhivkov I.
Title: Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf® FRT
Keywords: Chromatic white lightStylus profilometerThickness measurements

Abstract: This paper compares Chromatic white light (CWL) and stylus profilometer measurements. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-300 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin organic films with higher than 40-50 nm film thicknesses. © 2013 Bulgarian Academy of Sciences, Union of Chemists in Bulgaria

References

    Issue

    Jubilee scientific session “Interdisciplinary Chemistry”, Institute of Optical Materials and Technologies "Acad. Jordan Malinovski", 17 – 18 October 2013, 2013, Bulgaria, Bulgarian Academy of Sciences, ISBN ISSN: 08619808

    Цитирания (Citation/s):
    1. Xu, B., Wang, C., Ma, J., (...), Gui, P., Liu, K., A rapid resistance measurement system for quartz pendulums, Review of Scientific Instruments 91(9),093301 - 2020 - в издания, индексирани в Scopus или Web of Science

    Вид: пленарен доклад в международен форум, публикация в издание с импакт фактор, публикация в реферирано издание, индексирана в Scopus