Autors: Dutsolova, Y., Kolev, G., Aleksandrova, M. P., Andreev, S. K., Dobrikov, G. H., Denishev, K. H.
Title: Patterning of piezoelectric thin films from PZT and ZnO for application in MEMS devices
Keywords: piezoelectric thin films, PZT, ZnO, MEMS devices



    National Scientific and Practical Conference for Young Scientists, 25 – 26 April, pp. 76-79, 2013, Bulgaria,

    Вид: пленарен доклад в национален форум