Autors: Kolev, G., Denishev, K. H., Aleksandrova, M. P., Dutsolova, Y.
Title: Investigation of Thin PZT and ZnO Piezoelectric Layers in Dynamic Mode for Application in MEMS
Keywords: piezoelectric layers, MEMS, thin films, microelectronic technologies

References

    Issue

    XLVIII International Scientific Conference on Information, Communication and Energy Systems and Technologies – ICEST 2013, 26 - 29 June 2013, vol. 2, pp. 691-694, 2013, Macedonia,

    Цитирания (Citation/s):
    1. Salam Khrissi, Houda Lifi, Mohamed Lifi, Naima Nossir, Yassine Tabbai and Salma Kaotar Hnawi, Piezoelectric Vibration Energy Harvesters with Distinct Interdigitated Electrodes were Used for Toxic Gas Detection and in a Numerical Simulation for a Glucose Sensor Application, Mar 2022, International Journal of Sensors, Wireless Communications and Control, 12(4) - 2022 - в издания, индексирани в Scopus или Web of Science

    Вид: публикация в международен форум, публикация в реферирано издание