|Autors: Kolev, G., Aleksandrova, M. P., Denishev, K. H.|
Title: Spray Deposition of PVDF Layers with Application in MEMS Pressure Sensors
Keywords: polyviniliden fluoride; PVDF; pressure sensors; microelectro-mechanical systems;
Abstract: Layers of piezoelectrical polymer polyviniliden fluoride (PVDF) were prepared by spray deposition technique on silicon, glass substrates and glass substrates with thin aluminium (Al) and cooper (Cu) films. The deposition temperature of the substrates and the concentration of the solution were investigated and their influence on the adhesion to the surface and the film’s morphology were explored. The pre- and post deposition temperature treatment of the sample was conducted and the changes in the layer’s behaviour was detected.
Вид: статия в списание, публикация в издание с импакт фактор