Autors: Rusev, R. P., Ruskova, I. N., Angelov, G. V., Nikolov, D. N., Gieva, E. E., Radonov, R. I., Minkov, D. A. Title: TCAD model of GAA Nanowire Transistor with silicon oxide/nitride/oxide dielectric Keywords: TCAD, silicon nanowire, COMSOL modelling Abstract: By reducing the size of transistors, their integration increases, their consumption decreases, but undesirable short-channel effects occur in them. To avoid these effects, junctionless JLFETs, which are composed of a single nanowire (NW), have been developed. The device layer is fully depleted when the gate voltage is lower than the threshold voltage when the gate voltage is increased, so electrons are attracted towards the oxide/semiconductor interface, and the depletion region width is reduced, thus a channel between the source and the drain below the depletion region is created, and a bulk current flows. The doping of the channel, its length, the work function of the gate electrode and the material of the gate dielectric are important parameters [1-4]. Technology computer-aided design (TCAD) models can give us advantages for device operation of JL FET depending on the above design parameters. The effect of a three-layer subgate dielectric on transistor performance is investigated. References
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