| Autors: Chavushyan, V. C., Nikolov, S. N., Georgieva, V. G. Title: Study of problems in application and design of scara robots in the semiconductor industry Keywords: Robotics, Welding, Group theory, Industry, Semiconductors Abstract: The paper presents the main problems in operating SCARA robots in the semiconductor industry. Different groups of existing problems, related to vacuum environments are identified, including ones, justifying the need for separation of the robot’s working area, for limiting the vacuum pressure in the chamber, avoiding the contamination of the working area etc. The physical changes occurring in the robots during their operation in vacuum are discussed. The existing methods for solving the identified problems, described in the literature, are presented in detail, taking into account the specifics of each of the five groups of methods, namely the ones, related to the use of static or dynamic vacuum barriers, to prevention of external and virtual leaks, to materials and surface finishes etc. The problems arising in the application of the described methods are considered and guidelines for their overcoming, based on suitable choice of elements, their geometry, old and newly developed materia References Issue
Copyright AIP Conference Proceedings |
Вид: пленарен доклад в международен форум, публикация в реферирано издание
