Autors: Yanchev, V. V., Manolov, E. D., Hristov, M. H., Grozdanov, V. E., Radonov, R. I.
Title: Modeling and Simulation of MEMS Horizontal Thermal Actuator with Coventor Design Environment
Keywords: MEMS, Horizontal thermal actuator, PolyMUMPs, Coventor.

Abstract: MEMS motion and actuation, traditionally has been achieved, using electrostatical comb-drive or parallelplate actuation techniques. While successful, this actuation method typically provides a small force per unit area and requires a high actuation voltage. Surface micromachined electro-thermo-mechanical actuator designs can overcome these disadvantages, providing a 100 times higher output force, 10 times lower actuation voltages and large motion. In this work, a micro-machined actuator was modeled and analyzed using Coventor design environment.


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Annual Journal of Electronics, vol. 2, book 2, pp. 124 - 127, 2011, Bulgaria, ISSN 1313-1842

Вид: статия в списание