Autors: Delibozov N. G., Radonov, R. I., Hristov, M. H.
Title: Design Kit Creation for a Novel MEMS Technology
Keywords: Design Kit, MEMS, Library cells, Design

Abstract: This paper presents the design and implementation of a MEMS design kit for a Bulgarian nanotechnology, which can be used in CADENCE (MEMS Xplorer) environment. The technology file, which represents electrical and design rules, the MEMS devices creation and customization, as well as the creation of library cells are described. Some samples of MEMS structures designed using that design kit are shown. The created design kit is intended for MEMS type “Matrix”.


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  2. Tao Chen, Liguo Chen, Lining Sun, Jiachou Wang, and Xinxin Li, A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper, C. Xiong et al. (Eds.): ICIRA 2008, Part II, LNAI 5315, pp. 207–216, 2008.


Annual Journal of Electronics, vol. 7, pp. 207 - 210, 2013, Bulgaria, ISSN 1314-0078

Вид: статия в списание, публикация в реферирано издание