|Autors: T, T. S.
Title: Microelectromechanical systems for automation and control: A brief survey
Keywords: MEMS, sensor, actuator, automation, control
Abstract: Abstract: This paper illustrates the great impacts exerted by micro electromechanical sensor and actuators which are produced to perform automation and control operations for industrial processes. More recent developments are discussed which suggest market prospects for MEMS devices. Some market data and forecasts are presented. The paper provides a technical and commercial insight into the applications of MEMS technology to automation and control devices as well as shows high growth for innovative developments in this area.
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Вид: публикация в международен форум, публикация в реферирано издание