Autors: T, T. S.
Title: Microelectromechanical systems for automation and control: A brief survey
Keywords: MEMS, sensor, actuator, automation, control

Abstract: Abstract: This paper illustrates the great impacts exerted by micro electromechanical sensor and actuators which are produced to perform automation and control operations for industrial processes. More recent developments are discussed which suggest market prospects for MEMS devices. Some market data and forecasts are presented. The paper provides a technical and commercial insight into the applications of MEMS technology to automation and control devices as well as shows high growth for innovative developments in this area.



    Proceedings of the International Conference on Information Technologies (InfoTech-2013) 19-20 September 2013, Bulgaria, pp. 304-311, 2013, Bulgaria, ISSN 1313-8250

    Copyright InfoTech2013

    Full text of the publication

    Вид: публикация в международен форум, публикация в реферирано издание