Autors: Aleksandrova, M. P., Kolev, G. D., Andrey Brigadin., Alexander Lukin.
Title: Mass-Sensitive Gas Detectors Based on Bulk Micromachined Silicon Cantilevers Coated by Carbyne-Enriched Nanolayer
Keywords: Mass-Sensitive Gas Detectors, Bulk Micromachined Silicon, Ca

References

    Issue

    45th International Spring Seminar on Electronics Technology, 11-15 May 2022, pp. 1-6, 2022, Austria, IEEE Xplore, ISSN 2161-2536

    Вид: пленарен доклад в международен форум, публикация в реферирано издание, индексирана в Scopus и Web of Science