Autors: Aleksandrova, M. P.
Title: Optimization of Grayscale Photolithography Process for Fabrication of Patterned Backside Electrodes in Perovskite Solar Cells
Keywords: grayscale photolithography, patterned electrode, perovskite solar cells

Abstract: This paper explores the optimization of grayscale photolithography for creating patterned backside electrodes in perovskite solar cells. The goal is to enhance light reflectance and improve the efficiency of these solar cells. The study investigates different substrates (glass, silicon, and plastic) and examines the impact of various processing conditions, including photoresist deposition, soft-baking, exposure time, and development time. The research also considers the effect of UV treatment on the wetting properties of the substrates. The preliminary results indicate that silicon substrates with aluminum coating and patterned using the optimized process show the highest reflectance of the reference illuminating light beyond 9171 cd/m2. UV treated PET also exhibited comparable reflectance of 8977cd/m2

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Issue

2025 19th International Conference on Electrical Machines, Drives and Power Systems, ELMA 2025 - Proceedings, 2025, Bulgaria, https://doi.org/10.1109/ELMA65795.2025.11083499

Вид: публикация в международен форум, публикация в реферирано издание, индексирана в Scopus