Е-Публикации
Технически университет - София

Abstract: In precise engineering, as well as in micromechanical system design, manufacturing and test equipment, it is essential to measure the deviations of the form, orientation and mutual arrangement of flat surfaces of the various modules. The requirements for measuring systems, depending on the specific field of application, are becoming higher both for functional and accuracy capabilities (working range, resolution, measurement accuracy, repeatability and reproducibility of measurement results, etc.). A key point in the development of high-precision schematic solutions of measuring systems is the comprehensive study of the currently existing MSs and their metrological capabilities

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