Autors: Yanchev, V. V., Manolov, E. D., Hristov, M. H., Grozdanov, V. E., Radonov, R. I.
Title: Modeling and Simulation of MEMS Horizontal Thermal Actuator with Coventor Design Environment
Keywords: MEMS, Horizontal thermal actuator, PolyMUMPs, Coventor.Abstract: MEMS motion and actuation, traditionally has been achieved, using electrostatical comb-drive or parallelplate actuation techniques. While successful, this actuation method typically provides a small force per unit area and requires a high actuation voltage. Surface micromachined electro-thermo-mechanical actuator designs can overcome these disadvantages, providing a 100 times higher output force, 10 times lower actuation voltages and large motion.
In this work, a micro-machined actuator was modeled and
analyzed using Coventor design environment. References - Vulcheva E., Ivanov I., Hristov M., Grozdanov V., Gaydazhiev D., Denishev K., Methods for Real Time Measurement of Y-Displacement of the MEMS Horizontal Thermal Actuator (ANNUAL JOURNAL OF ELECTRONICS, 2009 )
- Hristov M., T. Takov, I. Cholakova, K. Denishev, Vl. Grozdanov, D.Gaydazhiev, Design and Investigation of a Thermal Actuator, PROCEEDINGS OF THE XVII INTERNATIONAL SCIENTIFIC AND APPLIED SCIENCE CONFERENCE – ELECTRONICS ET’2008, book 4, 2008, p. 43-48, ISSN 1313- 1842.
- Carter J., A. Cowen, B. Hardy, R. Mahadevan, M. Stonefield, S. Wilcenski, PolyMUMPs Design Handbook, MEMSCAP Inc, 2005.
- Yan, Dong, Mechanical Design and Modelling of MEMS Thermal Actuators for RF Applications, Waterloo, Ontario, 2002.
- Conant, R., A., Richard, S. Muller, Cyclic Fatigue Testing of Surface – Micromachined Thermal Actuators, University of California, Berkeley, 1999.
- www.coventor.com
- www.ansys.com/products/default.asp
Issue
| Annual Journal of Electronics, vol. 2, book 2, pp. 124 - 127, 2011, Bulgaria, ISSN 1313-1842 |
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